EPITAXIAL SILICON SOLAR CELLS WITH MOISTURE BARRIER

摘要

A thin epitaxial silicon solar cell includes one or more layers of doped oxides on the backside. A silicon nitride layer that serves as a moisture barrier is formed on the one or more layers of doped oxides. The doped oxides provide dopants for forming doped regions in an epitaxial silicon layer. Metal contacts are electrically coupled to the doped regions through the silicon nitride layer and the one or more layers of doped oxides.

主权项

1. A solar cell comprising:
an epitaxial silicon layer; a doped oxide on the epitaxial silicon layer; a silicon nitride layer on the doped oxide; and a metal contact on a backside of the solar cell, wherein the metal contact is electrically coupled to a doped region of the solar cell via a contact opening through the silicon nitride layer and the doped oxide.