发明名称 POLISHING COMPOSITION
摘要 The present invention provides a polishing composition having excellent storage stability. The present invention is a polishing composition comprising abrasive grains and an oxidizing agent containing a halogen atom, wherein a value (A/B) determined by dividing the sum total (A) (unit: groups) of silanol groups contained in the abrasive grains in the polishing composition by the concentration (B) (unit: % by mass) of the oxidizing agent in the polishing composition is 8 × 1023 or less.
申请公布号 WO2015045757(A1) 申请公布日期 2015.04.02
申请号 WO2014JP73076 申请日期 2014.09.02
申请人 FUJIMI INCORPORATED 发明人 TAMADA, SHUICHI
分类号 C09K3/14;B24B37/00;C09G1/02;H01L21/304 主分类号 C09K3/14
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