Method for producing mold for fine pattern transfer, method for producing diffraction grating using same, and method for manufacturing organic EL element which comprises the diffraction grating

摘要

A method for producing a mold comprises: to coat a base (10) with a block copolymer solution (30), said block copolymer being composed of first and second polymers; to carry out a first annealing process at a temperature higher than the glass transition temperature of the block copolymer after drying the coating film; to form a microrelief structure (36) on the base by removing the second polymer by an etching process; to subject the microrelief structure (36) to a second annealing process at a temperature higher than the glass transition temperature of the first polymer; to form a seed layer (40) on the microrelief structure; to laminate a metal layer (50) on the seed layer (40) by electroforming; and to remove the metal layer (50) from the base. The microrelief structure (70) on the base is successfully transferred to the metal layer by the second annealing process. Consequently, a mold for fine pattern transfer, which is suitable for the production of an optical component such as a diffraction grating, is provided.