发明名称 Axial magnetic field ion source and related ionization methods
摘要 <p>An ion source (100; 300; 600) is configured for electron ionization and produces coaxial electron and ion beams. The ion source includes an ionization chamber (208) along an axis, a magnet assembly (112; 612) configured for generating an axial magnetic field in the ionization chamber, an electron source(116), and a lens assembly (120) configured for directing the ion beam out from the ionization chamber along the axis, reflecting the electron beam back toward the electron source, and transmitting higher energy ions out from the ion source while reflecting lower energy ions toward a lens element for neutralization. </p>
申请公布号 EP2819144(A3) 申请公布日期 2015.04.01
申请号 EP20140167844 申请日期 2014.05.12
申请人 AGILENT TECHNOLOGIES, INC. 发明人 PREST, HARRY;RUSS, CHARLES;KERNAN, JEFFREY
分类号 H01J27/20;H01J27/02;H01J49/14 主分类号 H01J27/20
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