发明名称 Microfluidic surface processing systems with self-regulated distance-to-surface control
摘要 <p>A microfluidic surface processing system includes a microfluidic probe head having a processing fluid circuit configured to dispense a surface processing fluid from a processing fluid aperture thereof; a linkage mechanism, configured to apply a force to or modulate a force applied to the microfluidic probe head towards a surface to be processed; and a lifting fluid circuit integral with the microfluidic probe head and distinct from the processing fluid circuit, the lifting fluid circuit designed for dispensing a lifting fluid from a lifting fluid aperture thereof, with pressure such as to counter the force applied or modulated by the linkage mechanism, at the level of the surface.</p>
申请公布号 GB201502378(D0) 申请公布日期 2015.04.01
申请号 GB20150002378 申请日期 2013.08.29
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人
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