发明名称 |
Interference filter, optical filter device, optical module, and electronic apparatus |
摘要 |
A variable wavelength interference filter includes a stationary substrate, a stationary reflecting film disposed on the entire surface of the stationary substrate opposed to a movable substrate, and formed of a multilayer film, a movable reflecting film opposed to the stationary reflecting film, and a first mirror electrode disposed on the stationary reflecting film. |
申请公布号 |
EP2853931(A1) |
申请公布日期 |
2015.04.01 |
申请号 |
EP20140186596 |
申请日期 |
2014.09.26 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
SHINTO, SUSUMU;SANO, AKIRA |
分类号 |
G02B5/28;G01J3/26;G02B26/00;G09G3/34 |
主分类号 |
G02B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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