发明名称 Interference filter, optical filter device, optical module, and electronic apparatus
摘要 A variable wavelength interference filter includes a stationary substrate, a stationary reflecting film disposed on the entire surface of the stationary substrate opposed to a movable substrate, and formed of a multilayer film, a movable reflecting film opposed to the stationary reflecting film, and a first mirror electrode disposed on the stationary reflecting film.
申请公布号 EP2853931(A1) 申请公布日期 2015.04.01
申请号 EP20140186596 申请日期 2014.09.26
申请人 SEIKO EPSON CORPORATION 发明人 SHINTO, SUSUMU;SANO, AKIRA
分类号 G02B5/28;G01J3/26;G02B26/00;G09G3/34 主分类号 G02B5/28
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