发明名称 ヘテロ構造を有する細長い単結晶ナノ構造に基づくトンネル効果トランジスタ
摘要 <p>Tunnel field-effect transistors (TFETs) are regarded as successors of metal-oxide semiconductor field-effect transistors (MOSFETs), but silicon-based TFETs typically suffer from low on-currents, a drawback related to the large resistance of the tunnel barrier. To achieve higher on-currents a nanowire-based TFET with a germanium (Ge) tunnel barrier in an otherwise silicon (Si) channel is used. A nanowire is introduced such that the lattice mismatch between silicon and germanium does not result in a highly defective interface. A dynamic power reduction as well as a static power reduction can result, compared to conventional MOSFET configurations. Multiple layers of logic can therefore be envisioned with these nanowire Si/Ge TFETs resulting in ultra-high on-chip transistor densities.</p>
申请公布号 JP5695255(B2) 申请公布日期 2015.04.01
申请号 JP20140142336 申请日期 2014.07.10
申请人 发明人
分类号 H01L21/336;H01L21/8238;H01L27/08;H01L27/092;H01L29/06;H01L29/66;H01L29/78;H01L29/786 主分类号 H01L21/336
代理机构 代理人
主权项
地址