| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an visual inspection apparatus capable of stably detecting a defect such as a poor plate adhesion which occurs on the surface of a plated layer, and the like. <P>SOLUTION: The visual inspection apparatus 20 is configured to inspect an appearance of a substrate to be inspected 10 having a pad part and the plated layer whose color is different from that of the pad part. The visual inspection apparatus 20 includes: an illuminating device for illuminating the substrate to be inspected 10 with light; a color sensor camera 22 for acquiring a color image by photographing the substrate to be inspected 10; and an image processing device 30 connected with the color sensor camera 22. The image processing device 30 includes: a component extraction unit 32 for extracting an image component in the color image, containing only a specific wavelength component representing a low reflectivity when reflected from the pad part, and a high reflectivity when reflected from the plated layer; an image processing unit 33 for processing an image composed of the image component containing the specific wavelength component; and a decision unit 34 for determining the defect of the plated layer. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
