| 摘要 |
An apparatus (100) for aligning a substrate (200) is disclosed. The apparatus includes: two or more conveying units (120), each conveying unit (120) comprising two or more supporting elements (130, 140, 150, 160, 170, 180, 190, 195, 199) configured to rotate about a first rotation axis (400) to convey the substrate (200), wherein each supporting element (130, 140, 150, 160, 170, 180, 190, 195, 199) includes a cone element provided with a lateral surface (151; 161, 162; 171; 181; 191; 196) configured to support the substrate (200). |
