Microlenses for multibeam arrays of optoelectronic devices for high frequency operation

摘要

A VCSEL array device formed of a monolithic array of raised VCSELs on an electrical contact and raised inactive regions connected to the electrical contact. The VCSELs can be spaced symmetrically or asymmetrically, in a manner to improve power or speed, or in phase and in parallel. The raised VCSELs and raised inactive regions are positioned between the electrical contact and an electrical waveguide. The VCSELs may be separated into subarrays and each VCSEL may be covered with an integrated or bonded microlens for directing light without external lenses. The microlenses may be offset to collect or collimate light and may be shaped to form various lens profiles.

主权项

1. An optical device, comprising:
a monolithic laser array including a plurality of vertical cavity surface emitting laser (VCSEL) devices and a plurality of raised inactive regions on an electrical contact, the VCSEL devices being arranged in a pattern on a substrate of the laser array, each of the VCSEL devices generating a beam of light having an axis; and a plurality of refractive micro lenses formed within the substrate, each microlens among the plurality of microlenses being located over a corresponding VCSEL device, each microlens in a set of microlenses among the plurality of microlenses being positioned over each corresponding VCSEL device at an offset relative to the axis of the VCSEL device so as collimate or concentrate the beam of light emitted by the corresponding VCSEL device to a target or for scanning without requiring optical elements external to the laser array to collimate or concentrate the light for illumination of the target.