| 摘要 |
<PICT:1100560/C6-C7/1> A method of cleaning by glow discharge and coating by sputtering whereby diamonds are coated with Mo or Ti followed by Cu in an atmosphere of hydrogen and A, He or Kr. The apparatus comprises a vacuum chamber 12 enclosing a bucket shaped cathode 11 containing diamonds to be coated, a movable sputtering cathode 17 of the same material, a second sputtering cathode (not shown) mounted on support 51 and an anode 16. Cathode 11 contains a heating element flexibly connected to an A. C. supply by springs 31, 32 permitting the cathode to be rocked by a rotating electromagnet 47. Preliminary cleaning comprises heating the chamber with external infrared lamps 18, 19 and heating cathode 11 whilst evacuating the chamber and purging with hydrogen. A voltage is then applied across the anode and cathodes 11, 17 in dotted position to effect glow discharge cleaning during which the cathode 11 is rocked to expose all the diamond surfaces and argon almost completely replaces hydrogen. Cathode 17 is swung beneath anode 16 and the potential of cathode 11 made continuously more positive than 17 causing sputtering to commence and increase and the glow discharge to continue but to decrease. When sputtering starts the heater of cathode 11 is disconnected. A second coating e.g. Cu may be deposited from the other sputtering cathode. The diamonds may then be compressed and the Cu sintered or melted resulting in a compact of diamonds. The method may be used to coat less than the entire surface.
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