| 发明名称 |
SEMICONDUCTOR DEVICE FOR DETECTING POSITION ALIGNMENT DEVIATION |
| 摘要 |
PURPOSE:To electrically estimate or assess the goodness or not of the deviation in position alignment with the device wherein an annular gate electrode is made through the insulation on a semiconductor body, using the inner side thereof as source and the outer side as drain. |
| 申请公布号 |
JPS5339875(A) |
申请公布日期 |
1978.04.12 |
| 申请号 |
JP19760115020 |
申请日期 |
1976.09.24 |
| 申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
OOKURA ISAO;OOMORI MASASHI |
| 分类号 |
H01L29/78;G05D3/00;G05D3/12;H01L21/027;H01L21/312;H01L21/68 |
主分类号 |
H01L29/78 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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