Microelectromechanical system

摘要

In various embodiments, a microelectromechanical system may include a chip, a substrate, a signal generator, and a fixing structure configured to fix the chip to the substrate. The chip may be fixed in such a way that, upon an acceleration of the microelectromechanical system, the chip is moved relative to the substrate. Furthermore, a signal may be generated by the movement of the chip by means of the signal generator.

主权项

1. A microelectromechanical system, comprising:
a chip; a substrate; a signal generator; and a coupling structure configured to couple the chip to the substrate; wherein the chip is coupled in such a way that, upon an acceleration of the microelectromechanical system, the chip is moved relative to the substrate, and wherein a signal is generated by the relative movement of the chip by means of the signal generator; wherein the chip is embodied as a signal detector and evaluator, comprising a signal detection and evaluation circuit; and wherein the chip has a transponder.