发明名称 PROTECTION OF POROUS SUBSTRATES BEFORE TREATMENT
摘要 PROBLEM TO BE SOLVED: To provide a method which permits treatment of a porous material surface while protecting it from excessive damage.SOLUTION: A method for treating a surface 5 of a porous material 3 in an environment comprises the following steps I to III: I) first, contacting the porous material 3 with an organic gas 11g in an environment having a pressure P1 and a temperature T1, where at the pressure P1 and at the temperature T1, the organic gas 11g remains a gas when outside the porous material 3 but condenses as an organic liquid 11l when in contact with the porous material 3 thereby filling pores 12 of the porous material 3 with the organic liquid 11l; II) after the step I, cooling down the porous material 3 to a temperature T2 such that the organic liquid 11l freezes within the pores 12, thereby sealing the pores 12 with an organic solid 11s, thereby providing a protected porous material 4; and III) after the step II, performing treatment 7 on the surface 5.
申请公布号 JP2015061073(A) 申请公布日期 2015.03.30
申请号 JP20140130604 申请日期 2014.06.25
申请人 IMEC VZW 发明人 BAKLANOV MIKHAIL
分类号 H01L21/312;H01L21/3065 主分类号 H01L21/312
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