发明名称 TEST HANDLER
摘要 <p>PURPOSE: A test handler is provided to improve the reliability of a test by changing a diameter of a spraying unit of a duct according to an air spraying position to reduce a difference between a temperature of a semiconductor and a preset temperature. CONSTITUTION: A test handler(TH) includes a test tray(210), a test chamber(220), a match plate(230), and a temperature control device(240). The test tray loads a plurality of semiconductor devices. The test chamber tests the plurality of semiconductor devices at a required temperature and electrically connects the semiconductor devices to the tester by pushing the semiconductor devices. A temperature control device controls the temperatures of the semiconductor devices loaded on a test tray.</p>
申请公布号 KR101505959(B1) 申请公布日期 2015.03.27
申请号 KR20110005021 申请日期 2011.01.18
申请人 发明人
分类号 G01R31/26;G05D16/14;H01L21/66 主分类号 G01R31/26
代理机构 代理人
主权项
地址