OPTICAL FILTER AND OPTICAL MODULE PROVIDED WITH SAME

摘要

An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The first substrate has a flat surface. The second substrate includes a first surface, a second surface and a third surface, the second surface surrounding the first surface in a plan view, the third surface surrounding the second surface in a plan view, a height of the first surface above the second surface being lower than a height of the third surface above the second surface, the first surface and the second surface facing the flat surface of the first substrate. The first mirror is disposed on the flat surface of the first substrate. The second mirror is disposed on the first surface of the second substrate, the second mirror facing the first mirror. The first electrode is disposed on the flat surface of the first substrate. The second electrode is disposed on the second surface of the second substrate, the second electrode facing the first electrode.

主权项

1. An optical filter comprising:
a first substrate having a flat surface; a second substrate including a first surface, a second surface and a third surface, the second surface surrounding the first surface in a plan view, the third surface surrounding the second surface in a plan view, a height of the first surface above the second surface being lower than a height of the third surface above the second surface, the first surface and the second surface facing the flat surface of the first substrate; a first mirror disposed on the flat surface of the first substrate; a second mirror disposed on the first surface of the second substrate, the second mirror facing the first mirror; a first electrode disposed on the flat surface of the first substrate; and a second electrode disposed on the second surface of the second substrate, the second electrode facing the first electrode.