| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing unit excellent in cooling performance.SOLUTION: A processing unit includes a substrate loading part capable of loading a substrate thereon, holding means for holding the substrate on the substrate loading part by generating a pressing force between itself and the substrate loading part, cooling means for cooling the substrate loading part, and rotating means for rotating the substrate loading part together with the cooling means. Further, a vibration isolating member is arranged on the peripheral part of an elastic body of the cooling means. |
