| 摘要 |
According to an embodiment, provided is a spiral coating apparatus which includes a stage, a nozzle, a moving unit, a gas supply part, a cleaning solution part, and a nozzle cleaning part. A stage has a mounting surface for mounting a coating object. The nozzle injects a solution to the coating object mounted on the stage. The moving unit relatively moves the nozzle with regard to the stage. The gas supply part supplies a gas. The cleaning solution supply part supplies a cleaning solution. The nozzle cleaning part has a gas supply hole and a cleaning solution supply hole, injects the gas supplied from the gas supply part to the nozzle, and injects the cleaning solution supplied from the cleaning solution supply part to the nozzle. |
