DUAL DETECTION CONFOCAL REFLECTING MICROSCOPE AND METHOD OF DETECTING INFORMATION ON HEIGHT OF SAMPLE USING SAME

摘要

Provided are a confocal microscope and a method for detecting information on the height of a specimen. According to an embodiment of the present invention, the confocal microscope with multiple pin holes is capable of detecting information on the height of a specimen based on the intensity of reflected light transmitted through the pin holes, and is capable of generating the three-dimensional image of the specimen based on the detected information on the height of the specimen. The confocal microscope is capable of detecting the information on the height of the specimen without the mechanical movement of the confocal microscope and/or the specimen, and is capable of generating the three-dimensional image of the specimen just by scanning the specimen on a two-dimensional plane. The confocal microscope comprises: an object lens through which light emitted to the specimen is transmitted and the reflected light reflected by the specimen when the light is emitted to the specimen are transmitted; a first pin hole through which first reflected light split from the reflected light by a beam splitter is transmitted; a second pin hole through which second reflected light split from the reflected light by the beam splitter in a direction different from the first reflected light is transmitted; and a processing part detecting the information on the height of the specimen, which is observed by the confocal microscope, based on first intensity of the first reflected light and second intensity of the second reflected light, wherein the first and second pin holes have different sizes.