| 摘要 |
A method for manufacturing a vertical-cavity surface-emitting laser, provided with: a step for forming a laminated article comprising first and second reflection mirror layers (11, 15), an active layer (13), and an oxidizable layer (16), to be formed into a current confinement structure, on a substrate; a step for machining the laminated article so that at least a side surface of the oxidizable layer (16) is exposed; and a step, after the laminated article is machined, for causing the oxidizable layer (16) to be oxidized from the side surface and thereby forming a current confinement structure. The above step for forming a current confinement structure includes a step for holding the substrate (SUB) along, and set apart from, a heat equalizing plate (41) placed on a heat transfer member (42), and a step for heating the heat transfer member (42) and thereby heating the substrate (SUB) using heat radiated from the heat equalizing plate (41). |
