| 摘要 |
The present invention provides an air-floating-type noncontact support mechanism, which is capable of reducing the amount of air used, compared with a conventional support mechanism, and a transport apparatus having the noncontact support mechanism. The noncontact support mechanism has a top surface having a flat disc shape, and supports an object to be supported in a noncontact state by generating a flow of air between the top surface and the object to be supported. The noncontact support mechanism has a groove portion having a circular shape as viewed from the top surface, wherein the groove portion is inclined to have an angle of about 20°-60° with respect to a diameter direction of the top surface at a position near the outer periphery of the top surface. |
