| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator structure for optical path length control that is improved in assemblability, can be made compact, and can be constituted at low cost. <P>SOLUTION: In the piezoelectric actuator structure for optical path length control that has a piezoelectric actuator 41 coupled to a mirror holder 22 holding a mirror M for optical path length control, and is configured to displace the mirror M by driving the piezoelectric actuator 41, the mirror holder 22 and piezoelectric actuator 41 are coupled to each other by mutually joining center parts thereof together. In the coupling state, the mirror holder 22 and piezoelectric actuator 41 are made to bend in such directions that the center parts thereof approximate each other. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
