| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent the generation of a discharging abnormality in a coating head which is attributed to lowering of suction force in a suction head for cleaning the coating head. <P>SOLUTION: The coating device comprises the following components: a coating head which discharges a liquid from a discharge orifice formed in a discharge surface; a suction head 6a which includes a suction port H1 for sucking a liquid sticking to the discharge surface together with air and an internal flow path 6a1 communicating with the suction port H1; a gas-liquid flow path tube 6b which communicates with the internal flow path 6a1 of the suction head 6a; a suction device 6e which can apply suction force to the suction port H1 through the internal flow path 6a1 and the gas-liquid flow path tube 6b; and a cleaning device 6f which flushes a cleaning liquid into the internal flow path 6a1 and the gas-liquid flow path tube 6b. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
