Radio-frequency device package and method for fabricating the same

摘要

The invention provides a radio-frequency (RF) device package and a method for fabricating the same. An exemplary embodiment of a radio-frequency (RF) device package includes a base, wherein a radio-frequency (RF) device chip is mounted on the base. The RF device chip includes a semiconductor substrate having a front side and a back side. A radio-frequency (RF) component is disposed on the front side of the semiconductor substrate. An interconnect structure is disposed on the RF component, wherein the interconnect structure is electrically connected to the RF component, and a thickness of the semiconductor substrate is less than that of the interconnect structure. A through hole is formed through the semiconductor substrate from the back side of the semiconductor substrate, and is connected to the interconnect structure. A TSV structure is disposed in the through hole.

主权项

1. A radio-frequency (RF) device package, comprising:
a base; and a radio-frequency (RF) device chip mounted on the base, wherein the RF device chip comprises: a semiconductor substrate having a front side and a back side; a radio-frequency (RF) component disposed on the front side of the semiconductor substrate; an interconnect structure disposed on the RF component, wherein the interconnect structure is electrically connected to the RF component, and a thickness of the semiconductor substrate is less than that of the interconnect structure; a through hole formed through the semiconductor substrate from the back side of the semiconductor substrate, connecting to the interconnect structure; and a TSV structure disposed in the through hole.