Vibrator in vibration type driving apparatus and manufacturing method thereof

摘要

A vibrator, which constitutes a vibrating device of a vibration-type driving apparatus in which the vibrating device is bonded to an electromechanical-energy-conversion element, has at least one projection portion thereon, and elliptic motion can arise at each projection portion by applying an alternating electric field to the electromechanical-energy-conversion element. A driven object moves by the elliptic motion when in contact with the projection portion in a direction intersecting with a width direction. The vibrator includes a base and the at least one projection portion, with each projection portion having at least two wall portions extending in a base out-of-plane direction, and a contact portion having a contact surface with the driven object. The contact surface connects the wall portions, and boundary portions between the base and the wall portions are provided such that displacement directions in a normal direction are the same.

主权项

1. A vibrating device comprising:
a vibrator comprising:
a base; andat least one projection portion, the at least one projection portion comprising:
two wall portions which extend in a normal direction of the base, in a cross-sectional view including the normal direction; anda contact portion which has a contact surface connecting the two wall portions with each other; and an electro-mechanical conversion element bonded to the vibrator,
wherein directions of displacement of the two wall portions in the normal direction on a main surface of the base are the same direction,wherein the at least one projection portion has a hollow construction which is formed by the two wall portions and the contact portion, wherein the at least one projection portion and the base are formed from a single piece, and wherein the electro-mechanical energy conversion element is overlapped with the at least one projection portion.