发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device which uses a GaN-based semiconductor and has improved reliability.SOLUTION: A semiconductor device comprises: a GaN-based semiconductor layer 12 in which a surface has an angle of not less than 0 degree and not more than 5 degrees with respect to an m-plane or an a-plane; a first electrode 14 which is provided on a surface and has a first end; and a second electrode 16 which is provided on the surface at a distance from the first electrode 14 and has a second end opposite to the first end, in which a direction of a line linking any point of the first end and any point of the second end is different from a c-axis direction of the GaN-based semiconductor layer. |
申请公布号 |
JP2015056637(A) |
申请公布日期 |
2015.03.23 |
申请号 |
JP20130191128 |
申请日期 |
2013.09.13 |
申请人 |
TOSHIBA CORP |
发明人 |
YASUMOTO YASUAKI;YANASE NAOKO;ABE KAZUHIDE;UCHIHARA TSUKASA;SAITO YASUNOBU;NAKA TOSHIYUKI;YOSHIOKA AKIRA;ONO YU;ONO TETSUYA;FUJIMOTO HIDETOSHI;MASUKO SHINGO;FURUKAWA MASARU;YAGI YASUNARI;YUMOTO MIKI;IIDA ATSUKO |
分类号 |
H01L21/338;H01L21/28;H01L21/336;H01L29/41;H01L29/417;H01L29/47;H01L29/778;H01L29/78;H01L29/812 |
主分类号 |
H01L21/338 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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