发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which uses a GaN-based semiconductor and has improved reliability.SOLUTION: A semiconductor device comprises: a GaN-based semiconductor layer 12 in which a surface has an angle of not less than 0 degree and not more than 5 degrees with respect to an m-plane or an a-plane; a first electrode 14 which is provided on a surface and has a first end; and a second electrode 16 which is provided on the surface at a distance from the first electrode 14 and has a second end opposite to the first end, in which a direction of a line linking any point of the first end and any point of the second end is different from a c-axis direction of the GaN-based semiconductor layer.
申请公布号 JP2015056637(A) 申请公布日期 2015.03.23
申请号 JP20130191128 申请日期 2013.09.13
申请人 TOSHIBA CORP 发明人 YASUMOTO YASUAKI;YANASE NAOKO;ABE KAZUHIDE;UCHIHARA TSUKASA;SAITO YASUNOBU;NAKA TOSHIYUKI;YOSHIOKA AKIRA;ONO YU;ONO TETSUYA;FUJIMOTO HIDETOSHI;MASUKO SHINGO;FURUKAWA MASARU;YAGI YASUNARI;YUMOTO MIKI;IIDA ATSUKO
分类号 H01L21/338;H01L21/28;H01L21/336;H01L29/41;H01L29/417;H01L29/47;H01L29/778;H01L29/78;H01L29/812 主分类号 H01L21/338
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