| 摘要 |
<p>PROBLEM TO BE SOLVED: To implement a charged particle beam device for enabling a user to acquire excellent data after minimum user learning, improve the user's skill through operation, and feel sense of accomplishment.SOLUTION: A charged particle beam device comprising a control unit for controlling a charged particle beam source, charged particle optical system, detector, sample stage, sample room, and image display device, displays a message for confirming, with an operator, whether a phenomenon of image distortion, brightness unevenness, lack of stereoscopic effect, or an image blur occurs in a sample image, a first button to be pushed by the operator when the phenomenon of image distortion, brightness unevenness, or lack of stereoscopic effect occurs in the sample image, and a second button to be pushed by the operator when the phenomenon of image blur occurs in the sample image, with the sample image on the display unit; and displays a message showing a cause according to an observation condition when the first button or the second button is pushed. Thereby, even a beginner can easily recognize quality of an imaging result and obtain a cause and solution, which improves his/her skill on the charged particle beam device to enable improvement of image quality.</p> |
