晶圆边缘修割刀及修整晶圆边缘的方法,申请号TW101135483-传众专利搜索

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发明名称	晶圆边缘修割刀及修整晶圆边缘的方法
摘要
申请公布号	TWI477357	申请公布日期	2015.03.21
申请号	TW101135483	申请日期	2012.09.27
申请人	台湾积体电路制造股份有限公司	发明人	郭俊廷;陈科维;王英郎;魏国修
分类号	B24D3/24;B24D5/00	主分类号	B24D3/24
代理机构		代理人	洪澄文台北市南港区三重路19之6号2楼;颜锦顺台北市南港区三重路19之6号2楼
主权项	一种晶圆边缘修割刀(wafer edge trim blade)，包括：一圆形刀体；以及至少一凹槽，形成于该圆形刀体的一外侧边缘内；其中该至少一凹槽的设置系用以移除在利用该晶圆边缘修割刀进行晶圆边缘修整(wafer edge trimming)时所产生的碎屑，且该至少一凹槽以90度角正交于该圆形刀体的该外侧边缘，并具有一圆形尾端，该圆形尾端的长度为该至少一凹槽的凹槽宽度的0.5倍至1.5倍。
地址	新竹市新竹科学工业园区力行六路8号

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