| 摘要 |
FIELD: physics.SUBSTANCE: method is based on irradiating a surface with a moving laser beam in areas of the surface of the material with an absorption coefficient of not less than 3·10cmat the laser wavelength, wherein each area is irradiated using a series of laser pulses with pulse duration of not more than 30 ns, and energy density F of the laser beam in the irradiated area is set in the range F=0.005-1.0 J/cmto enable splitting of the surface layer of the material without melting and forming on the surface of the material sub-micrometre cracks, slits and flakes with size ranging from 0.05 mcm to 0.8 mcm.EFFECT: simplified method of producing micro- and nanostructures for a wide range of materials.12 cl, 1 tbl, 7 dwg |
