| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for simply evaluating solubility in a solvent of a polymer for lithography at low temperature with high precision.SOLUTION: A method for evaluating a polymer for semiconductor lithography includes the steps (1) and (2): a step (1) of preparing test solution which contains a polymer for semiconductor lithography and a good solvent of the polymer and a poor solvent of the polymer, and has no precipitation of the polymer; and a step (2) of lowering a temperature of the test solution, measuring a temperature in which the polymer is precipitated, and evaluating solubility of the polymer at low temperature. |
