| 发明名称 |
METHOD OF DEPOSITING THIN METAL-ORGANIC FILMS |
| 摘要 |
Embodiments include systems, apparatuses, and methods of thin metal-organic film deposition with inkjet printheads. A method of depositing a metal-organic thin film over a substrate includes introducing chemical precursors into one or more piezoelectric printheads. The chemical precursors including a metallic compound and a reactive liquid or gas. The method further includes dispensing droplets or a stream of the chemical precursors with the piezoelectric printheads onto a surface of the substrate supported by a stage in a vacuum chamber. |
| 申请公布号 |
US2015079301(A1) |
申请公布日期 |
2015.03.19 |
| 申请号 |
US201314067851 |
申请日期 |
2013.10.30 |
| 申请人 |
NEMANI Srinivas;YIEH Ellie;LUBOMIRSKY Dmitry |
发明人 |
NEMANI Srinivas;YIEH Ellie;LUBOMIRSKY Dmitry |
| 分类号 |
B05D1/02;B05C5/02;B05D3/06 |
主分类号 |
B05D1/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of depositing a metal-organic thin film over a substrate, the method comprising:
introducing chemical precursors into one or more piezoelectric printheads, the chemical precursors including a metallic compound and a reactive liquid or gas; dispensing droplets or a stream of the chemical precursors with the one or more piezoelectric printheads onto a surface of the substrate supported by a stage in a vacuum chamber. |
| 地址 |
Sunnyvale CA US |
