Apparatus and method for surface treatment

摘要

The present invention discloses a surface treating apparatus comprising: a reaction tube accommodating an workpiece to be treated; a heating portion prepared on the external part of the reaction tube to heat the reaction tube at a predetermined temperature; a first and second electrodes prepared in the inner portion of the reaction tube to be faced with each other and on which one or more the workpiece to be treated is prepared between the first and second electrodes; a power supply portion for supplying the power source to the first and second electrodes; and a reacting gas providing unit for supplying reaction gas to the inner side of the reaction tube, and a surface processing method.