发明名称 |
METHOD OF DEPOSITING THIN METAL-ORGANIC FILMS |
摘要 |
<p>Embodiments include systems, apparatuses, and methods of thin metal-organic film deposition with inkjet printheads. A method of depositing a metal-organic thin film over a substrate includes introducing chemical precursors into one or more piezoelectric printheads. The chemical precursors including a metallic compound and a reactive liquid or gas. The method further includes dispensing droplets or a stream of the chemical precursors with the piezoelectric printheads onto a surface of the substrate supported by a stage in a vacuum chamber.</p> |
申请公布号 |
WO2015038303(A1) |
申请公布日期 |
2015.03.19 |
申请号 |
WO2014US51930 |
申请日期 |
2014.08.20 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
NEMANI, SRINIVAS;YIEH, ELLIE;LUBOMIRSKY, DMITRY |
分类号 |
C23C16/44;C23C16/458;H01L21/205 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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