| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection device and defect inspection method with which defects can be rapidly detected and the positions of defects of an analyte (not only defects present on the surface of the analyte but also defects present inside the analyte) in an X-ray incidence direction can be easily determined.SOLUTION: A defect inspection device 100 according to one embodiment of the present invention includes: X-ray detectors 102a and 102b on which X-rays 108a and 108b which have passed through an analyte 107 are incident; and a control and calculation device 105 that forms a first defect line and a second defect line in a three-dimensional image of the analyte developed in a three-dimensional coordinate system and acquires the three-dimensional coordinates of the intersection of the lines. |
