METHOD FOR MANUFACTURING OPTICAL SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor integrated optical semiconductor device capable of achieving an optical module transmitting a small-sized and high-speed optical signal.SOLUTION: A manufacture method includes: growing a quantum well structure on a ridge having two regions which are formed on a semiconductor substrate and contact each other under a predetermined pressure with an organic metal vapor growth method; and etching the quantum well structure with reactive gas under a pressure different from the predetermined pressure. In each of the two regions, semiconductor elements having different quantum well structures can be formed.