发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
Disclosed is a semiconductor device wherein characteristic fluctuation of an analog circuit that requires trimming adjustment is suppressed small in long-term storage after package sealing and reflow. On an embedded oxide film (13) of a semiconductor substrate (44), an analog circuit having a trimming mechanism for output adjustment is formed. A trench structure is formed to surround at least one of elements constituting the analog circuit, and the trench structure is provided with an insulating oxide layer (11) having a hollow structure (12). |
申请公布号 |
WO2015037166(A1) |
申请公布日期 |
2015.03.19 |
申请号 |
WO2014JP02467 |
申请日期 |
2014.05.09 |
申请人 |
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD. |
发明人 |
YAMANE, ICHIRO;INOUE, MASAKI |
分类号 |
H01L21/822;G05F1/56;H01L21/329;H01L21/331;H01L21/76;H01L27/04;H01L29/732;H01L29/861;H01L29/866;H01L29/868 |
主分类号 |
H01L21/822 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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