发明名称 SEMICONDUCTOR DEVICE
摘要 Disclosed is a semiconductor device wherein characteristic fluctuation of an analog circuit that requires trimming adjustment is suppressed small in long-term storage after package sealing and reflow. On an embedded oxide film (13) of a semiconductor substrate (44), an analog circuit having a trimming mechanism for output adjustment is formed. A trench structure is formed to surround at least one of elements constituting the analog circuit, and the trench structure is provided with an insulating oxide layer (11) having a hollow structure (12).
申请公布号 WO2015037166(A1) 申请公布日期 2015.03.19
申请号 WO2014JP02467 申请日期 2014.05.09
申请人 PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD. 发明人 YAMANE, ICHIRO;INOUE, MASAKI
分类号 H01L21/822;G05F1/56;H01L21/329;H01L21/331;H01L21/76;H01L27/04;H01L29/732;H01L29/861;H01L29/866;H01L29/868 主分类号 H01L21/822
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