发明名称 投影光学系
摘要 An optical projection unit includes first and second optical element modules. The first optical element module includes a first housing unit and a first optical element received within the first housing unit and having an optically used first region defining a first optical axis. The second optical element module is located adjacent to the first optical element module and includes a second optical element which defines a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is laterally offset and/or inclined with respect to the first housing axis. The first housing axis is substantially collinear with the second optical axis.
申请公布号 JP5685510(B2) 申请公布日期 2015.03.18
申请号 JP20110208150 申请日期 2011.09.22
申请人 カール・ツァイス・エスエムティー・ゲーエムベーハー 发明人 ラウ ヨハネス;シェーパッハ アルミン;ゲルリッヒ ベルンハルト;クグラー イェンス;マールマン マルティン;ゴイッペルト ベルンハルト;ぺタシュ トーマス;フュルター ゲルンハルト
分类号 G02B7/02;G03F7/20;H01L21/027 主分类号 G02B7/02
代理机构 代理人
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