发明名称 |
投影光学系 |
摘要 |
An optical projection unit includes first and second optical element modules. The first optical element module includes a first housing unit and a first optical element received within the first housing unit and having an optically used first region defining a first optical axis. The second optical element module is located adjacent to the first optical element module and includes a second optical element which defines a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is laterally offset and/or inclined with respect to the first housing axis. The first housing axis is substantially collinear with the second optical axis. |
申请公布号 |
JP5685510(B2) |
申请公布日期 |
2015.03.18 |
申请号 |
JP20110208150 |
申请日期 |
2011.09.22 |
申请人 |
カール・ツァイス・エスエムティー・ゲーエムベーハー |
发明人 |
ラウ ヨハネス;シェーパッハ アルミン;ゲルリッヒ ベルンハルト;クグラー イェンス;マールマン マルティン;ゴイッペルト ベルンハルト;ぺタシュ トーマス;フュルター ゲルンハルト |
分类号 |
G02B7/02;G03F7/20;H01L21/027 |
主分类号 |
G02B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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