发明名称 半導体チップ、半導体チップの製造方法、および半導体装置
摘要 According to one embodiment, a semiconductor chip includes a semiconductor substrate, a via and an insulating layer. The semiconductor substrate has a first major surface and a second major surface on opposite side from the first major surface. The semiconductor substrate is provided with a circuit section including an element and a wiring and a guard ring structure section surrounding the circuit section on the first major surface side. The via is provided in a via hole extending from the first major surface side to the second major surface side of the semiconductor substrate. The insulating layer is provided in a first trench extending from the first major surface side to the second major surface side of the semiconductor substrate.
申请公布号 JP5684654(B2) 申请公布日期 2015.03.18
申请号 JP20110136449 申请日期 2011.06.20
申请人 株式会社東芝 发明人 津村 一道;東 和幸
分类号 H01L21/3205;H01L21/768;H01L23/522;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L21/3205
代理机构 代理人
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