| 摘要 |
PROBLEM TO BE SOLVED: To provide an IGZO sintered compact having a minimal amount of a degenerated surface layer caused by firing.SOLUTION: The IGZO sintered compact is produced by molding a mixture of powders of indium oxide, gallium oxide and zinc oxide and firing the molding obtained. The firing is conducted by placing the molding in a container which is closed except a specific opening. Further, the firing is made by spreading the zinc oxide powder in the container. This procedure makes the thickness of a degenerated surface layer, which contains InGaZnOand is formed on the surface upon firing, not greater than 1 mm. |
