| 发明名称 |
MULTI-ANALYZER ANGLE SPECTROSCOPIC ELLIPSOMETRY |
| 摘要 |
<p>Ellipsometry systems and ellipsometry data collection methods with improved stabilities are disclosed. In accordance with the present disclosure, two or more analyzer angles may be utilized to collect ellipsometry data for a single measurement. Utilizing two or more analyzer angles for a single measurement improves the stability of the ellipsometry system.</p> |
| 申请公布号 |
EP2729789(A4) |
申请公布日期 |
2015.03.18 |
| 申请号 |
EP20120807285 |
申请日期 |
2012.07.03 |
| 申请人 |
KLA-TENCOR CORPORATION |
发明人 |
KWAK, HINDONG;DIXON, WARD;POSLAVSKY, LEONID;KAACK, TORSTEN |
| 分类号 |
G01N21/21;G01J4/00 |
主分类号 |
G01N21/21 |
| 代理机构 |
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代理人 |
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| 主权项 |
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