| 摘要 |
<p>The system has a mirror arrangement (200) including mirror elements (200a-200c) adjustable independent of each other for changing an angle distribution of light reflected by the mirror arrangement. An overlapping degree between polarization-affecting components (101-103) e.g. Lambda/2-plates, of a polarization-affecting optical arrangement (100) and the mirror arrangement is variably adjustable by displacing the components. A deflection device (300) e.g. prism, includes reflection surfaces (300a, 300b) upstream and downstream of the mirror arrangement relative to a light propagation direction. The mirror arrangement is a micro mirror array. An independent claim is also included for a method for microlithographic manufacturing of microstructured components.</p> |
