METHOD FOR MANUFACTURING GLASS SUBSTRATE, AND APPARATUS FOR MANUFACTURING GLASS SUBSTRATE

摘要

In a method for manufacturing a glass substrate, the method comprising performing an etching process through use of a processing gas 5 in a processing region 4 provided above a conveyance path of a glass substrate 3 in a chamber 2 while the glass substrate 3 is conveyed in a horizontal direction, the glass substrate 3 being carried into the chamber 2 from a loading port 2aa, and then carrying the processed glass substrate 3 out of the chamber 2 from a delivery port 2ab, windbreak members 12 in which openings 12a for allowing passage of the conveyed glass substrate 3 therethrough are provided between the loading port 2aa and the processing region 4 and between the processing region 4 and the delivery port 2ab on the conveyance path of the glass substrate 3.