Material-working device with in-situ measurement of the working distance

摘要

A material-working device with working beams of a beam generator and with in-situ measurement of a working distance between the beam generator and a workpiece, the material-working device including a working laser; a laser scanner for the working laser, the laser scanner including a two-dimensional deflecting device with scanner mirrors and a variable refocusing device at varying working distances; and a sensor device including a spectrometer and at least one sensor light source, wherein measuring beams together scan a working area of the workpiece by the laser scanner and an objective lens while gathering the working distance, and the measuring beams of at least two of the light sources of the sensor device being linearly polarized and being coupled into a working beam path of the laser scanner of the material-working device by an optical coupling element in a collimated state with crossed polarization directions.

主权项

1. A material-working device with working beams of a beam generator and with in-situ measurement of a working distance between the beam generator and a workpiece, the material-working device comprising:
a working laser; a laser scanner for the working laser, the laser scanner including a two-dimensional deflecting device with scanner mirrors and a variable refocusing device for varying working distances; an objective lens; and a sensor device including a spectrometer, at least two sensor light sources generating measuring beams, and an optical coupling element, wherein the measuring beams are linearly polarized in crossed polarization directions and collimated using the optical coupling element, and then directed to the workpiece through the laser scanner and the objective lens, and then directed back to the spectrometer to record the workpiece distance.