Methods for doping fin field-effect transistors

摘要

An embodiment of the disclosure includes doping a FinFET. A dopant-rich layer comprising an dopant is formed on a top surface and sidewalls of a semiconductor fin of a substrate. A cap layer is formed to cover the dopant-rich layer. The substrate is annealed to drives the dopant from the dopant-rich layer into the semiconductor fin.

主权项

1. A method of doping a FinFET, the method comprising:
providing a substrate, the substrate comprising a first device region, a second device region, and a semiconductor fin formed on a surface of the substrate, wherein the semiconductor fin has a top surface and sidewalls and is formed in the second device region; covering the first device region with a hard mask; depositing a dopant-rich layer comprising an n-type or p-type dopant on the top surface and the sidewalls of the semiconductor fin, wherein depositing the dopant-rich layer comprises depositing the dopant directly on the top surface and sidewalls of the semiconductor fin; depositing a cap layer over the dopant-rich layer; and annealing the substrate to drive the dopant from the dopant-rich layer into the semiconductor fin, the annealing being performed with the semiconductor fin uncovered by the hard mask and with the first device region covered by the hard mask and free of the dopant-rich layer.