Nano-fabricated structured diamond abrasive article

摘要

The present invention describes a microfabricated or nanofabricated structured diamond abrasive with a high surface density array of geometrical protrusions of pyramidal, truncated pyramidal or other shape, of designed shapes, sizes and placements, which provides for improved conditioning of CMP polishing pads, or other abrasive roles. Three methods of fabricating the structured diamond abrasive are described: molding of diamond into an array of grooves of various shapes and sizes etched into Si or another substrate material, with subsequent transferal onto another substrate and removal of the Si; etching of an array of geometrical protrusions into a thick diamond layer, and depositing a thick diamond layer over a substrate pre-patterned (or pre-structured) with an array of geometrical protrusions of designed sizes, shapes and placements on the surface.

主权项

1. A method comprising:
providing a substrate comprising a first surface and a second surface; selecting at least one first size, at least one first shape, and at least one first location on said first surface; providing at least one mold on said first surface, said at least one mold comprising at least one second size, said at least one second shape, and said at least on second location on said first surface, wherein said at least one second size is the same as said at least one first size, said at least one second shape is the same as said at least one first shape, and said at least one second location is the same as said at least one first location; depositing a first layer comprising diamond on said first surface, said layer at least partially filling said at least one mold; removing at least a portion of said mold; adhering a second layer to said second surface;wherein at least one of said at least one first size, at least one first shape, and at least one first location on said first surface is selected to provide a desired abrasion rate.