Tunable MEMS resonators

摘要

Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part having a cavity and a post and (ii) a second part mated to the first part and including a movable layer located under the post. Each part may be covered with a metal layer on the surface facing the other part. The movable plate may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post may be positioned in the middle of the cavity. The movable plate may be attached to the second part (i) via an anchor and operated as a cantilever or (ii) via two anchors and operated as a bridge.

主权项

1. A resonator, comprising:
a cavity; a post extending into the cavity; a movable plate located within the cavity and spaced apart from the post; a metal layer disposed on a surface of the post facing the movable plate, wherein a variable capacitor is formed between the movable plate and the metal layer; a first dielectric layer located between the movable plate and the metal layer; a biasing electrode located on the opposite side of the movable plate as the post; and a second dielectric layer located between the movable plate and the biasing electrode, wherein application of a voltage to the biasing electrode causes movement of the movable plate towards the biasing electrode.