发明名称 Ridge structure for back side illuminated image sensor
摘要 Provided is an image sensor device. The image sensor device includes a substrate having a front side and a back side. The image sensor includes first and second radiation-detection devices that are disposed in the substrate. The first and second radiation-detection devices are operable to detect radiation waves that enter the substrate through the back side. The image sensor also includes an anti-reflective coating (ARC) layer. The ARC layer is disposed over the back side of the substrate. The ARC layer has first and second ridges that are disposed over the first and second radiation-detection devices, respectively. The first and second ridges each have a first refractive index value. The first and second ridges are separated by a substance having a second refractive index value that is less than the first refractive index value.
申请公布号 US8981510(B2) 申请公布日期 2015.03.17
申请号 US201012794101 申请日期 2010.06.04
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Chuang Chun-Chieh;Yaung Dun-Nian;Liu Jen-Cheng;Chou Keng-Yu;Wang Wen-De;Chen Pao-Tung
分类号 H01L31/0232;H01L27/146 主分类号 H01L31/0232
代理机构 Haynes and Boone, LLP 代理人 Haynes and Boone, LLP
主权项 1. An apparatus comprising an image sensor device that comprises: a substrate having a front side and a back side; an interconnect structure disposed over the front side of the substrate; a first radiation-detection device and a second radiation-detection device disposed in the substrate, the first and second radiation-detection devices being operable to detect radiation waves that enter the substrate through the back side; an isolation structure disposed between the first and second radiation-detection devices; an anti-reflective coating (ARC) layer having a first refractive index value disposed over the back side of the substrate, the ARC layer having a first ridge and a second ridge that are disposed over the first and second radiation-detection devices, respectively; a first lens disposed directly over the first ridge and having opposing ends extending beyond opposing sidewalls of the first ridge; and a second lens disposed directly over the second ridge and having opposing ends extending beyond opposing sidewalls of the second ridge, wherein the first and second ridges are separated by a substance having a second refractive index value that is less than the first refractive index value, wherein the substance is air, wherein the air extends uninterrupted from the first ridge to the second ridge, wherein the substance and the isolation structure are vertically aligned along a plane extending substantially perpendicular to the back side of the substrate, and wherein the first and second ridges extend through the substance from a first surface at an interface of the substance, the first surface disposed towards the substrate, to a second surface at an interface of the substance, the second surface opposite the first surface.
地址 Hsin-Chu TW