发明名称 Method and apparatus of profiling a surface
摘要 A method and an apparatus of profiling a surface are disclosed. The method comprises projecting slit pattern light toward a target object in at least two directions in sequence to obtain pattern images reflected on the target object, obtaining heights by using the pattern images according to the directions, obtaining vector fields showing a direction of maximum variation of height, obtaining confidence indexes of the heights corresponding to the at least two directions, obtaining integrated vector fields by using the confidence indexes and the vector fields, and calculating height of each position of the target object by using the integrated vector fields. Therefore, accuracy is enhanced.
申请公布号 US8982330(B2) 申请公布日期 2015.03.17
申请号 US201113298969 申请日期 2011.11.17
申请人 Koh Young Technology Inc. 发明人 Vorobyev Evgeny
分类号 G01B11/25;G06T7/00 主分类号 G01B11/25
代理机构 Kile Park Reed & Houtteman PLLC 代理人 Kile Park Reed & Houtteman PLLC
主权项 1. A method of profiling a surface, comprising: projecting slit pattern light toward a target object in at least two directions in sequence by at least one pattern image projecting part to obtain pattern images reflected on the target object; obtaining heights by using the pattern images according to the directions by a computing part; obtaining vector fields showing a direction of maximum variation of height by the computing part; obtaining confidence indexes of the heights corresponding to the at least two directions by the computing part; obtaining integrated vector fields by using the confidence indexes and the vector fields by the computing part; and calculating height of each position of the target object by using the integrated vector fields by the computing part.
地址 Seoul KR