Method for determining COP generation factors for single-crystal silicon wafer

摘要

A whole determination area of a targeted wafer is concentrically divided in a radial direction, COP density is obtained in each divided determination segment, a maximum value of the COP density is set as COP densityRADIUSMAX, a minimum value of the COP density is set as COP densityRADIUSMIN, a value computed by “(COP densityRADIUSMAX−COP densityRADIUSMIN/COP densityRADIUSMAX” is compared to a predetermined set value, and a non-crystal-induced COP and a crystal-induced COP are distinguished from each other based on a clear criterion, thereby determining the COP generation factor. Therefore, a rejected wafer in which a determination of the crystal-induced COP is made despite being the non-crystal-induced COP can be relieved, so that a wafer production yield can be enhanced.

主权项

1. A method for determining a COP generation factor of a single-crystal silicon wafer comprising:
concentrically dividing a determination area of the single-crystal silicon wafer in a radial direction to form divided determination segments, determining for COPs generated in the divided determination segments, except for a central portion and an outer circumferential portion in the divided determination segments and for COPs generated in one or more of a line shape, a dot-line shape, and a dot shape locally in all of the divided determination segments that the COP generation factor is attributed to a factor except for a defect induced during crystal growth.