发明名称 |
Method of fabricating substrate and apparatus |
摘要 |
<p>Provided is a method for manufacturing a substrate. The method for manufacturing the substrate includes the steps of: preparing a base substrate and a roof ring on a susceptor in a chamber, wherein, the inner diameter of the roof ring is larger than the diameter of the base substrate and the roof ring surrounds the base substrate; and forming a material layer on the base substrate by supplying a source gas.</p> |
申请公布号 |
KR20150028891(A) |
申请公布日期 |
2015.03.17 |
申请号 |
KR20130106900 |
申请日期 |
2013.09.06 |
申请人 |
IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) |
发明人 |
LEE, SEONG KUK;SHIM, KWANG BO |
分类号 |
H01L21/20 |
主分类号 |
H01L21/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|